High-quality structures on 4H-SiC fabricated by femtosecond laser LIPSS and chemical etching
Yan-Cheng Liang, Yi-En Li, Yi-Hsien Liu, Jia-Fan Kuo, Chung‐Wei Cheng, An‐Chen Lee
Topics & Concepts
Materials scienceFemtosecondLaserEtching (microfabrication)Raman spectroscopyIsotropic etchingLaser ablationAblationOpticsAmorphous solidSurface plasmon polaritonOptoelectronicsLayer (electronics)Surface plasmonNanotechnologyPlasmonEngineeringOrganic chemistryPhysicsAerospace engineeringChemistryLaser Material Processing TechniquesLaser-induced spectroscopy and plasmaAdvanced Surface Polishing Techniques