Evaluation of stress and energy relief efficiency of ZrN/Ti and ZrN/Zr
Jia‐Hong Huang, I-Sheng Ting, Ting-Wei Zheng
Topics & Concepts
Materials scienceZirconium nitrideComposite materialSubstrate (aquarium)NanoindentationCoatingResidual stressMetallurgyStress (linguistics)Sputter depositionMetalSputteringLayer (electronics)Thin filmNitrideTitanium nitrideNanotechnologyGeologyPhilosophyLinguisticsOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices