The effect of the interface reaction mode on chemical mechanical polishing
Zili Zhang, Zhuji Jin, Jiang Guo
Topics & Concepts
PolishingChemical-mechanical planarizationMaterials scienceScratchSlurryChemical reactionSurface finishMode (computer interface)Composite materialChemical engineeringChemistryComputer scienceEngineeringBiochemistryOperating systemAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationIntegrated Circuits and Semiconductor Failure Analysis