Zr-Ti getter film integration in MEMS vacuum packaging
Sylvain Lemettre, Clément Bessouet, A. Aassime, Philippe Coste, Alain Bosseboeuf, Johan Moulin
Topics & Concepts
Materials scienceGetterGrain boundaryAnnealing (glass)TitaniumAlloyMicroelectromechanical systemsGrain sizeZirconiumMetallurgyThin filmSorptionComposite materialOptoelectronicsNanotechnologyMicrostructureAdsorptionChemistryOrganic chemistrySemiconductor materials and devicesMetal and Thin Film MechanicsPlasma Diagnostics and Applications