Structural and Morphological Properties of Nano Photonic Silicon Structure for Photonics Applications
Mariam M. Hassan, Makram A. Fakhri, Salah A. Adnan
2020Defect and diffusion forum/Diffusion and defect data, solid state data. Part A, Defect and diffusion forum17 citationsDOIOpen Access PDF
Abstract
Porous silicon (n-PS) with diverse morphologies was prepared on silicon (Si) substrate via photo-electrochemical etching technique. We studies the structure, surface morphology, pore diameter, roughness, based on (XRD), (AFM), (SEM) at different etching time (5, 10 min) and current (10mA/cm 2 ).
Topics & Concepts
Materials sciencePorous siliconSiliconEtching (microfabrication)Substrate (aquarium)PhotonicsMorphology (biology)Nano-PorosityNanotechnologySurface roughnessSurface finishOptoelectronicsChemical engineeringComposite materialLayer (electronics)OceanographyGeologyEngineeringGeneticsBiologySilicon Nanostructures and PhotoluminescenceNanowire Synthesis and ApplicationsSemiconductor materials and devices