Mueller matrix spectroscopic ellipsometry
James N. Hilfiker, Nina Hong, Stefan Schoeche
Abstract
Abstract The Mueller matrix is a mathematical description of how light is altered by an optical element or a sample under study. It describes both intensity (irradiance) and polarization changes, including a reduction of the total polarization. Mueller matrix spectroscopic ellipsometry has gained recent popularity in the optics and semiconductor communities as an effective means to characterize complex sample structures and anisotropic materials. While this method is not new, its recent expansion to new fields has left many users with only a pedestrian understanding of the data they collect. This tutorial provides an overview of Mueller matrix spectroscopic ellipsometry with focus on practical aspects for those new to the technique.