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Role and optimization of thermal rapid annealing in Ta/TaOx/Ru based resistive switching memory

Jinshi Zhao, Yingchen Li, Jiacheng Li, Liwei Zhou

2021Vacuum22 citationsDOI

Topics & Concepts

Materials scienceAnnealing (glass)Resistive touchscreenOptoelectronicsThermalComputer sciencePhysicsThermodynamicsMetallurgyOperating systemAdvanced Memory and Neural ComputingFerroelectric and Negative Capacitance DevicesTransition Metal Oxide Nanomaterials
Role and optimization of thermal rapid annealing in Ta/TaOx/Ru based resistive switching memory | Litcius