Intermediate Cu-O-Si Phase in the Cu-SiO<sub>2</sub>/Si(111) System: Growth, Elemental, and Electrical Studies
Reshmi Sreedharan, Manu Mohan, Sonia Saini, Anupam Roy, A. K. Bhattacharjee
Abstract
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Topics & Concepts
X-ray photoelectron spectroscopyMaterials scienceAnalytical Chemistry (journal)Chemical stateCopperPhase (matter)SiliconCrystallographyChemistryChemical engineeringMetallurgyEngineeringChromatographyOrganic chemistryCopper Interconnects and ReliabilityCopper-based nanomaterials and applicationsSemiconductor materials and devices