Indirect Time-of-Flight CMOS Image Sensor With On-Chip Background Light Cancelling and Pseudo-Four-Tap/Two-Tap Hybrid Imaging for Motion Artifact Suppression
Donguk Kim, Seunghyun Lee, Dahwan Park, Canxing Piao, Jihoon Park, Yeonsoo Ahn, Kihwan Cho, Jungsoon Shin, Seung Min Song, Seong‐Jin Kim, Jung‐Hoon Chun, Jaehyuk Choi
Abstract
This article presents a 320 × 240 indirect time-of-flight (iToF) CMOS image sensor (CIS) with on-chip motion artifact suppression and background light cancelling (BGLC). The proposed iToF CIS uses a backside-illuminated trident pinned photodiode (PPD) that assists charge transfer with a built-in lateral electric field for enhanced depth accuracy. To overcome the limitation of the conventional iToF CIS that exhibits motion artifact, we propose a pseudo-four-tap (P4-tap) demodulation method with alternate phase driving using a conventional two-tap pixel structure with a high fill factor of over 43%. In addition, by combining the advantages of both the P4-tap and conventional two-tap demodulation schemes, we propose hybrid depth imaging with reduced motion artifact for moving objects, while providing high-depth precision for the static background. For outdoor mobile applications of the iToF CIS, we integrated on-chip BGLC circuits to eliminate the BGL-induced depth error. A prototype chip is fabricated using a 90-nm backside illumination (BSI) CIS process. The BSI trident PPD enabled a low depth error of under 0.54% over the range of 0.75-4 m, with a modulation frequency of 100 MHz. Motion artifact was suppressed at 60 frames/s of hybrid depth imaging owing to the proposed P4-tap scheme. With the on-chip BGLC circuit, the experimental results demonstrate a 0.55% depth error at a 1-m distance, even under 120-klx BGL illumination.