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Active cluster annotation for wafer map pattern classification in semiconductor manufacturing

Jaewoong Shim, Seokho Kang, Sungzoon Cho

2021Expert Systems with Applications23 citationsDOI

Topics & Concepts

AnnotationWaferComputer scienceCluster analysisSemiconductor device fabricationCluster (spacecraft)Artificial intelligenceConstruct (python library)Data miningPattern recognition (psychology)Convolutional neural networkMaterials scienceOptoelectronicsProgramming languageIndustrial Vision Systems and Defect DetectionImage Processing Techniques and ApplicationsAdvancements in Photolithography Techniques
Active cluster annotation for wafer map pattern classification in semiconductor manufacturing | Litcius