Characterization and analysis of a novel structural SOI piezoresistive pressure sensor with high sensitivity and linearity
Chuang Li, Libo Zhao, José Luis Ocaña Moreno, Francisco Cordovilla, Zhen Yin
Topics & Concepts
LinearityMaterials sciencePiezoresistive effectSilicon on insulatorSensitivity (control systems)Pressure sensorDiaphragm (acoustics)Microelectromechanical systemsWaferOptoelectronicsElectronic engineeringElectrical engineeringSiliconEngineeringMechanical engineeringLoudspeakerAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Sensor Technologies Research