Atomic-scale planarization surface of quartz glass induced by novel green chemical mechanical polishing using three ingredients
Dong Wang, Lu Liu, Zhenyu Zhang, Qibo Peng, Chunjing Shi, Xiuqing Liu, Xiaoyu Liu, Hongxiu Zhou, Wei Wen
Topics & Concepts
Chemical-mechanical planarizationSlurryMaterials scienceChemical engineeringX-ray photoelectron spectroscopyPolishingDissolutionSurface roughnessChemistryNanotechnologyComposite materialEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchBone Tissue Engineering Materials