Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope
Arnab Kumar Biswas, Vishal S. Pawar, P. Krishna Menon, Prem Pal, Ashok Kumar Pandey
Topics & Concepts
Deep reactive-ion etchingMicroelectromechanical systemsFabricationGyroscopeVibrating structure gyroscopeEtching (microfabrication)Materials sciencePassivationOptoelectronicsRotation (mathematics)Process (computing)Reactive-ion etchingNanotechnologyComputer scienceEngineeringAerospace engineeringLayer (electronics)Alternative medicinePathologyOperating systemArtificial intelligenceMedicineAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesPlasma Diagnostics and Applications