Growth and characterization of Si-doped Ga2O3 thin films by remote plasma atomic layer deposition: Toward UVC-LED application
Xiaoying Zhang, Yue Yang, Wei‐Hang Fan, Chen Wang, Wan-Yu Wu, Ming-Chun Tseng, Dong‐Sing Wuu, Peng Gao, Hao‐Chung Kuo, Shui‐Yang Lien, Wen‐Zhang Zhu
Topics & Concepts
Thin filmMaterials scienceX-ray photoelectron spectroscopyDopingAnalytical Chemistry (journal)EllipsometryTrimethylgalliumAnnealing (glass)Carbon filmElectrical resistivity and conductivitySiliconLayer (electronics)OptoelectronicsNanotechnologyMetalorganic vapour phase epitaxyComposite materialChemical engineeringEpitaxyChemistryElectrical engineeringChromatographyEngineeringGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques