The carbon and hydrogen contents in ALD-grown ZnO films define a narrow ALD temperature window
Bingbing Xia, J.‐J. Ganem, E. Briand, S Steydli, H. Tancrez, I. Vickridge
Topics & Concepts
Elastic recoil detectionNuclear reaction analysisRutherford backscattering spectrometryIon beam analysisAtomic layer depositionHydrogenCarbon fibersZincAnalytical Chemistry (journal)Materials scienceThin filmChemical vapor depositionMetalAtmospheric temperature rangeIon beam-assisted depositionIon beamChemistryIonNanotechnologyMetallurgyComposite materialComposite numberOrganic chemistryChromatographyPhysicsMeteorologyZnO doping and propertiesGa2O3 and related materialsElectronic and Structural Properties of Oxides