Epitaxial Growth of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films on Si with YSZ Buffer Layer
Hyung‐Jin Choi, Jun Young Lee, Soo Young Jung, Ruiguang Ning, Min‐Seok Kim, Sung‐Jin Jung, Sung Ok Won, Seung‐Hyub Baek, Ji‐Soo Jang
Abstract
thin films on a Si gold standard substrate, which will expand the application scope beyond high-power electronics.
Topics & Concepts
EpitaxyMaterials scienceYttria-stabilized zirconiaThin filmCubic zirconiaSubstrate (aquarium)Annealing (glass)Layer (electronics)Pulsed laser depositionOptoelectronicsMonoclinic crystal systemCrystallographyNanotechnologyComposite materialCrystal structureCeramicChemistryGeologyOceanographyGa2O3 and related materialsAdvanced Photocatalysis TechniquesZnO doping and properties