Non-thermal plasma etching of MOF thin films in high optical quality for interference sensing
Pavel V. Alekseevskiy, Maria Timofeeva, Semyon V. Bachinin, Regis Peignier, C. Noël, Pascal Boulet, Thierry Belmonte, Valentin A. Milichko
Topics & Concepts
Etching (microfabrication)Materials scienceInterference (communication)Surface finishPlasma etchingSurface roughnessPlasmaThin filmOptoelectronicsReactive-ion etchingNanotechnologyComposite materialComputer scienceQuantum mechanicsPhysicsLayer (electronics)Channel (broadcasting)Computer networkMetal-Organic Frameworks: Synthesis and ApplicationsZnO doping and propertiesLuminescence and Fluorescent Materials