Schottky barrier engineering with a metal nitride–double interlayer–semiconductor contact structure to achieve high thermal stability and ultralow contact resistivity
Euyjin Park, Seung‐Hwan Kim, Hyun‐Yong Yu
Topics & Concepts
Materials scienceDiffusion barrierSemiconductorSchottky barrierContact resistanceElectrical resistivity and conductivityThermal stabilityNitrideAnnealing (glass)Composite materialOptoelectronicsLayer (electronics)Chemical engineeringElectrical engineeringDiodeEngineeringSemiconductor materials and devicesSemiconductor materials and interfacesMetal and Thin Film Mechanics