Microstructural and mechanical characteristics of Cu-Sn intermetallic compound interconnects formed by TLPB with Cu-Sn nanocomposite
Han Jiang, Stuart Robertson, Shuibao Liang, Zhaoxia Zhou, Liguo Zhao, Changqing Liu
Abstract
Transient liquid phase bonding (TLPB) is a promising technology for three-dimensional integration of circuits (3D IC), but it can be slow and less productive. A novel Cu-Sn nanocomposite interlayer (Cu-Sn NI) composed of Sn matrix with an embedded Cu nanowire array prepared by electrodeposition can significantly accelerate the bonding process, approximately by 20 times. Bonding time with a Cu-Sn NI can be as short as ∼2 min to achieve a full Cu-Sn intermetallic compound (IMC) joints, whereas it can take ∼60 min with a pure Sn interlayer of the same thickness under the same bonding conditions (250 °C). Unlike the columnar Cu6Sn5 grains commonly formed with Sn interlayer, refined equiaxed Cu6Sn5 grains with an average size of ∼1.6 µm are found to be formed with Cu-Sn NI. Such grain refinement has significantly contributed to the improvement of shear strength of IMC joints formed with Cu-Sn NI (23.1 ± 3.3 MPa), higher than those bonded with pure Sn interlayer (17.9 ± 2.1 MPa). The underlying mechanisms of the new TLPB process and the formation of finer microstructure when bonding with Cu-Sn NIs are also illuminated and validated based on the experimental observation.