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Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving

Seyed Nader Ameli Kalkhoran, Mehrdad Vahdati, Zhiyu Zhang, Jiwang Yan

2020International Journal of Precision Engineering and Manufacturing-Green Technology20 citationsDOI

Topics & Concepts

Materials scienceLubricationLubricantWaxComposite materialCoatingDiamond turningMachiningCutting fluidWaferBrittlenessSiliconMetallurgyDiamondNanotechnologyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research
Influence of Wax Lubrication on Cutting Performance of Single-Crystal Silicon in Ultraprecision Microgrooving | Litcius