A digital force-to-rebalance scheme for high-frequency bulk-acoustic-wave micro-gyroscopes
Chong Li, Haoran Wen, Hua Chen, Farrokh Ayazi
Topics & Concepts
GyroscopeBandwidth (computing)Microelectromechanical systemsVibrating structure gyroscopeElectronic engineeringField-programmable gate arrayAcousticsComputer scienceMaterials scienceElectrical engineeringPhysicsEngineeringOptoelectronicsComputer hardwareTelecommunicationsAerospace engineeringAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators