Synthesis of TiN and TiO2 thin films by cathodic cage plasma deposition: a brief review

Luiz Henrique Portela de Abreu, M. Naeem, Wênio Fhará Alencar Borges, Renan Matos Monção, Rômulo Ríbeiro Magalhães de Sousa, Muhammad Abrar, Javed Iqbal

2020Journal of the Brazilian Society of Mechanical Sciences and Engineering19 citationsDOI

Topics & Concepts

Materials scienceTitanium nitrideDeposition (geology)TitaniumCathodic protectionTinThin filmNitridingNitridePlasmaPhysical vapor depositionNanotechnologyMetallurgyAnodeLayer (electronics)ElectrodeChemistryBiologyPaleontologyPhysical chemistryQuantum mechanicsSedimentPhysicsMetal and Thin Film MechanicsSemiconductor materials and devicesZnO doping and properties