Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical systems
Yong Wang, Sha Liu, Congshan Zhuo, Chengwen Zhong
Topics & Concepts
Nonlinear systemCantileverMechanicsOscillation (cell signaling)Classical mechanicsKinetic energyPhysicsMicroelectromechanical systemsBeam (structure)PerpendicularMaterials scienceMathematicsOpticsChemistryBiochemistryGeometryComposite materialQuantum mechanicsAdhesion, Friction, and Surface InteractionsMechanical and Optical ResonatorsAdvanced MEMS and NEMS Technologies