Enhanced performances of a-IGZO TFTs with oxide passivation layers fabricated by hollow cathode assisted PLD
Chen Wang, Chaofan Zeng, Haiyue Ning, Fengnan Li, Mingxia Liu, Kewei Xu, Fei Ma
Topics & Concepts
PassivationMaterials scienceOptoelectronicsAnnealing (glass)Threshold voltageThermal stabilityOxideNanotechnologyLayer (electronics)Chemical engineeringVoltageTransistorComposite materialElectrical engineeringMetallurgyEngineeringThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices