Acoustic wave devices based on piezoelectric/ferroelectric thin films for high-frequency communication systems and sensing applications
Yanmei Xue, Yuan Liu, Changjian Zhou, Xiu Yin Zhang
Topics & Concepts
Materials sciencePiezoelectricityFerroelectricityAcousticsOptoelectronicsThin filmNanotechnologyComposite materialDielectricPhysicsAcoustic Wave Resonator TechnologiesAdvanced MEMS and NEMS TechnologiesUltrasonics and Acoustic Wave Propagation