Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication
Zhengming Liu, Jian Xu, Zijie Lin, Jia Qi, Xiaolong Li, Aodong Zhang, Jintian Lin, Jianfang Chen, Zhiwei Fang, Yunpeng Song, Wei Chu, Ya Cheng
Topics & Concepts
Materials scienceMicrofabricationFemtosecondFabricationMicrochannelPolydimethylsiloxaneIsotropic etchingOpticsEtching (microfabrication)LaserWaveguideMicrofluidicsOptoelectronicsNanotechnologyLayer (electronics)PathologyAlternative medicinePhysicsMedicineLaser Material Processing TechniquesPhotonic and Optical DevicesAdvanced Surface Polishing Techniques