Confocal laser scanning and 3D reconstruction methods for the subsurface damage of polished optics
Huanyu Sun, Shiling Wang, Jinxi Bai, Jianpu Zhang, Jin Huang, Xiaoyan Zhou, Dong Liu, Chong Liu
Topics & Concepts
OpticsLaser scanningLaserMaterials scienceAperture (computer memory)Computer scienceWaferFootprintNumerical apertureConfocalOptoelectronicsPhysicsGeologyWavelengthPaleontologyAcousticsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesIntegrated Circuits and Semiconductor Failure Analysis