A Wafer-scale heterogeneous integration thermal simulator
Qinzhi Xu, Chenghan Wang, Zhiqiang Li, Daoqing Zhang, Xiaoning Ma, He Cao, Jianyun Liu
Topics & Concepts
Scale (ratio)WaferSimulationThermalComputer scienceMechanical engineeringEngineeringEnvironmental scienceElectrical engineeringMeteorologyPhysicsQuantum mechanics3D IC and TSV technologiesSemiconductor materials and devicesSilicon Carbide Semiconductor Technologies