Experimental validation and molecular dynamics simulation of removal of PO residue on Co surface by alkaline cleaning solution with different functional groups

Xiaoqin Sun, Shihao Zhang, Mengrui Liu, Baimei Tan, Yangang He, Da Yin, Pengcheng Gao, Yazhen Wang

2020Colloids and Surfaces A Physicochemical and Engineering Aspects41 citationsDOI

Topics & Concepts

X-ray photoelectron spectroscopyCobaltChemistryTetramethylammonium hydroxideEthylenediamineCleaning agentElectrochemistryChelationInorganic chemistryContact angleChemical engineeringOrganic chemistryPhysical chemistryElectrodeEngineeringAdvanced Surface Polishing TechniquesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis