$0.0062\ {}^{\circ}/\sqrt{hr}$ Angle Random Walk and $0.027\ {}^{\circ}/hr$ Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes

Abstract

This paper reports measured results for a fused-silica precision shell integrating (PSI) micro gyroscope employing out-of-plane drive/sense transduction mechanism. The PSI gyroscope is made with a 5 mm radius shell resonator operating in <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$n=2$</tex> wine-glass mode at a frequency ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$f_{n=2}$</tex> ) of 5.803 kHz with as-fabricated frequency split ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\Delta f$</tex> ) of 2.1 Hz. Large and reasonably uniform capacitance (∼0.25 pF) is achieved with flat surface electrodes. The gyroscope is operated in the force-rebalance mode by interfacing with an ultra-low-noise transimpedance amplifier (TIA). Near-navigation grade angle random walk (ARW) of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$0.0062\ \deg/\sqrt{\mathrm{h}}\mathrm{r}$</tex> , in-run bias instability (BI) of 0.027 deg/hr and scale factor of 158 mV/deg/s without any temperature compensation are achieved.

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