Wafer-scale freestanding vanadium dioxide film
He Ma, Xiao Xiao, Yu Wang, Yufei Sun, Bolun Wang, Xinyu Gao, Enze Wang, Kaili Jiang, Kai Liu, Xinping Zhang
Abstract
films find more intriguing applications by heterogeneous integration with other functional materials.
Topics & Concepts
WaferMaterials scienceVanadium dioxideEtching (microfabrication)NanotechnologyOptoelectronicsInsulator (electricity)Thin filmLayer (electronics)Transition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsZnO doping and properties