An innovative method to achieve large-scale high-quality VO2 thin films: Oxidation of vanadium nitride material deposited by sputtering
Wenqiang Xiang, Boris Le Drogoff, Mohamed Chaker
Topics & Concepts
Materials scienceSputteringThin filmSputter depositionAnnealing (glass)High-power impulse magnetron sputteringOptoelectronicsElectrical resistivity and conductivityVanadiumAnalytical Chemistry (journal)OxygenNanotechnologyMetallurgyChemistryElectrical engineeringEngineeringOrganic chemistryChromatographyTransition Metal Oxide NanomaterialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors