Investigation of amorphous-SiC thin film deposition by RF magnetron sputtering for optical applications
Didier Chaussende, Vincent Tabouret, Alexandre Crisci, Magali Morais, Stéphane Coindeau, G. Berthomé, Manuel Kollmuß, Peter J. Wellmann, François Jomard, M.A. Pinault-Thaury, Yaoqin Lu, Xiaodong Shi, Haiyan Ou
Topics & Concepts
Materials scienceSputter depositionAmorphous solidOptoelectronicsThin filmDeposition (geology)SputteringCavity magnetronHigh-power impulse magnetron sputteringNanotechnologyEngineering physicsCrystallographyEngineeringSedimentChemistryBiologyPaleontologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices