Backside wet etching of sapphire substrate by laser-induced carbothermal reduction
Tianyang Yan, Lingfei Ji, Minghui Hong
Topics & Concepts
Carbothermic reactionMaterials scienceSapphireEtching (microfabrication)LaserLayer (electronics)Substrate (aquarium)Raman spectroscopyFluenceOptoelectronicsCarbon fibersDry etchingNanotechnologyComposite materialOpticsCarbideGeologyComposite numberOceanographyPhysicsLaser Material Processing TechniquesLaser-induced spectroscopy and plasmaLaser-Ablation Synthesis of Nanoparticles