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A novel MEMS triboelectric energy harvester and sensor with a high vibrational operating frequency and wide bandwidth fabricated using UV-LIGA technique

H. M. Ashfiqul Hamid, Zeynep Çelik‐Butler

2020Sensors and Actuators A Physical31 citationsDOI

Topics & Concepts

Triboelectric effectPower densityLIGAMicroelectromechanical systemsMaterials scienceEnergy harvestingFabricationBandwidth (computing)OptoelectronicsElectrical engineeringPower (physics)EngineeringComposite materialPhysicsMedicineQuantum mechanicsPathologyTelecommunicationsAlternative medicineAdvanced Sensor and Energy Harvesting MaterialsInnovative Energy Harvesting TechnologiesConducting polymers and applications
A novel MEMS triboelectric energy harvester and sensor with a high vibrational operating frequency and wide bandwidth fabricated using UV-LIGA technique | Litcius