CNN and ensemble learning based wafer map failure pattern recognition based on local property based features
Minghao Piao, Cheng Jin
Topics & Concepts
Artificial intelligencePattern recognition (psychology)Convolutional neural networkComputer scienceFeature extractionClassifier (UML)Decision treeFeature (linguistics)Ensemble learningComputationArtificial neural networkProperty (philosophy)Data miningAlgorithmLinguisticsPhilosophyEpistemologyIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Surface Polishing Techniques