Influence of substrate bias voltage on structure, mechanical and corrosion properties of ZrO2 thin films deposited by Reactive Magnetron Sputter Deposition
Hind Zegtouf, Nadia Saoula, Mourad Azibi, Larbi Bait, Noureddine Madaoui, Mohamed Redha Khelladi, M. Kechouane
Topics & Concepts
Materials scienceNanoindentationCorrosionScanning electron microscopeThin filmSputter depositionMetallurgyZirconiumBiasingSputteringComposite materialAnalytical Chemistry (journal)NanotechnologyVoltageQuantum mechanicsChemistryPhysicsChromatographyMetal and Thin Film MechanicsSemiconductor materials and devicesElectronic and Structural Properties of Oxides