A high-resolution resonant torque sensor based on MEMS quartz resonator
Yanyu Ding, Ziming Ren, Shudong Wang, Weixuan Jing, Zhuangde Jiang, Xueyong Wei
Topics & Concepts
Microelectromechanical systemsMaterials scienceTuning forkResonatorMiniaturizationTorsion (gastropod)RepeatabilityAcousticsTransducerTorqueOptoelectronicsTorsion springEngineeringNanotechnologyStructural engineeringVibrationPhysicsChemistryThermodynamicsChromatographyMedicineSurgeryMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesNonlocal and gradient elasticity in micro/nano structures