Fixed abrasive polishing: the effect of particle size on the workpiece roughness and sub-surface damage
Xinyu Luo, Wei Yang, Qian Yuan
Topics & Concepts
PolishingAbrasiveParticle sizeSurface roughnessChemical-mechanical planarizationMaterials scienceSurface finishParticle (ecology)Particle-size distributionComposite materialMetallurgyEngineeringChemical engineeringGeologyOceanographyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research