Photoluminescence and Raman Spectroscopy Study on Color Centers of Helium Ion-Implanted 4H–SiC
Ying Song, Zongwei Xu, Rongrong Li, Hong Wang, Y. H. Fan, Mathias Rommel, Jiayu Liu, G. V. Astakhov, Gregor Hlawacek, Bingsheng Li, Jun Xu, Fengzhou Fang
Topics & Concepts
Materials sciencePhotoluminescenceRaman spectroscopySilicon carbideLaserSpectroscopySiliconOptoelectronicsHeliumIonAnalytical Chemistry (journal)OpticsAtomic physicsChemistryOrganic chemistryChromatographyMetallurgyQuantum mechanicsPhysicsIon-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research