Advancements and applications of micro and nanostructured capacitive sensors: A review
Vigneshwar Sakthivelpathi, Tianyi Li, Zhongjie Qian, Changwoo Lee, Zachary R. Taylor, Jae‐Hyun Chung
Topics & Concepts
Capacitive sensingNanotechnologyMaterials scienceEngineeringElectrical engineeringEngineering physicsProcess engineeringAdvanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and SensorsAnalytical Chemistry and Sensors