Modeling the microscale contact status in chemical mechanical polishing process
Lin Wang, Ping Zhou, Ying Yan, Dongming Guo
Topics & Concepts
Microscale chemistryPolishingMaterials scienceChemical-mechanical planarizationConditioningContact areaMechanical engineeringComposite materialProcess (computing)Process engineeringForensic engineeringComputer scienceEngineeringMathematicsStatisticsMathematics educationOperating systemAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research