Formation of tubular structures and microneedles on silicon surface by doughnut-shaped ultrashort laser pulses
Martin Zukerstein, Ján Hrabovský, Juraj Sládek, Inam Mirza, Yoann Lévy, Nadezhda M. Bulgakova
Topics & Concepts
Materials scienceFluenceLaserSiliconOpticsOptoelectronicsLaser ablationMonocrystalline siliconAblationUltrashort pulseCrystalline siliconPhysicsAerospace engineeringEngineeringLaser Material Processing TechniquesOcular and Laser Science ResearchNonlinear Optical Materials Studies