A critical review on performance, reliability, and fabrication challenges in nanosheet FET for future analog/digital IC applications
Sresta Valasa, Shubham Tayal, Laxman Raju Thoutam, J. Ajayan, Sandip Bhattacharya
Topics & Concepts
NanosheetReliability (semiconductor)FabricationComputer scienceElectronic engineeringMaterials scienceReliability engineeringEngineeringNanotechnologyMedicinePhysicsPathologyAlternative medicineQuantum mechanicsPower (physics)Semiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignFerroelectric and Negative Capacitance Devices