Microstructure and mechanical properties of (AlCrTiZrV)Nx high-entropy alloy nitride films by reactive magnetron sputtering
Liqiang Chen, Wei Li, Ping Liu, Ke Zhang, Fengcang Ma, Xiaohong Chen, Honglei Zhou, Xinkuan Liu
Topics & Concepts
Materials scienceMicrostructureSputter depositionCrystallinityElastic modulusSputteringHigh-resolution transmission electron microscopyAmorphous solidScanning electron microscopeAlloyNitrideComposite materialTransmission electron microscopyAnalytical Chemistry (journal)Thin filmCrystallographyNanotechnologyChemistryLayer (electronics)ChromatographyMetal and Thin Film MechanicsHigh Entropy Alloys StudiesHigh-Temperature Coating Behaviors