Laser-guided anisotropic etching for precision machining of micro-engineered glass components
Jun Li, Shuai Zhong, Jiaxu Huang, Pei Qiu, Pu Wang, Hui Li, Qin Chu, Duo Miao, Shaolin Xu
Topics & Concepts
Materials scienceEtching (microfabrication)Isotropic etchingOpticsMachiningLaserReactive-ion etchingAnisotropyIsotropyOptoelectronicsComposite materialLayer (electronics)MetallurgyPhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesOptical Coherence Tomography Applications