A single-crystalline native dielectric for two-dimensional semiconductors with an equivalent oxide thickness below 0.5 nm
Yichi Zhang, Yu Jia, Ruixue Zhu, Mengdi Wang, Congwei Tan, Teng Tu, Xuehan Zhou, Congcong Zhang, Mengshi Yu, Xiaoyin Gao, Yu-Fei Wang, Hongtao Liu, Peng Gao, Keji Lai, Hailin Peng
Topics & Concepts
Materials scienceDielectricTransistorOptoelectronicsSemiconductorWaferOxideLeakage (economics)Field-effect transistorGate dielectricHigh-κ dielectricGate oxideEquivalent oxide thicknessNanotechnologyVoltageElectrical engineeringMacroeconomicsEconomicsMetallurgyEngineeringSemiconductor materials and devicesElectronic and Structural Properties of OxidesFerroelectric and Negative Capacitance Devices