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Effect of metal mesh addition on polymer surface etching by an atmospheric pressure plasma jet

Tao Wang, Jiahao Wang, Shengquan Wang, Li Lv, Meng Li, Liping Shi

2021Applied Surface Science14 citationsDOI

Topics & Concepts

Etching (microfabrication)Atmospheric-pressure plasmaJet (fluid)Materials scienceReactive-ion etchingPlasma etchingIsotropic etchingPlasmaPolymerAtmospheric pressureDry etchingComposite materialChemical engineeringLayer (electronics)Aerospace engineeringEngineeringQuantum mechanicsGeologyOceanographyPhysicsSurface Modification and SuperhydrophobicityPlasma Applications and DiagnosticsPlasma Diagnostics and Applications
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