A simple approach to fabricate multi-layer glass microfluidic chips based on laser processing and thermocompression bonding
Yong Han, Zeheng Jiao, Jingjing Zhao, Zixi Chao, Zheng You
Topics & Concepts
MicrofluidicsFabricationMaterials scienceLayer (electronics)Anodic bondingThermocompression bondingNanotechnologyBorosilicate glassOptoelectronicsComposite materialAlternative medicinePathologyMedicineInnovative Microfluidic and Catalytic Techniques InnovationMicrofluidic and Capillary Electrophoresis ApplicationsElectrowetting and Microfluidic Technologies