Litcius/Paper detail

Residual stress development in lattice mismatched epitaxial thin films via atomic and molecular layer depositions

Musanna Galib, Okan K. Orhan, Jian Liu, Mauricio Ponga

2024Journal of the Mechanics and Physics of Solids13 citationsDOI

Topics & Concepts

Materials scienceResidual stressLattice (music)Thin filmCondensed matter physicsEpitaxyComposite materialLayer (electronics)CrystallographyNanotechnologyChemistryPhysicsAcousticsSemiconductor materials and devicesMetal and Thin Film MechanicsElectronic and Structural Properties of Oxides
Residual stress development in lattice mismatched epitaxial thin films via atomic and molecular layer depositions | Litcius